Dry Scrubber System – Automated, water-free purification of hazardous exhaust gases via chemical adsorption or reaction.
Multi-Cylinder Gas System – Integrated multi-cylinder design for automatic gas switching and precise delivery.
Fully Automatic Diffusion Cleaning System – High-precision, automated cleaning for wafers before and after diffusion processes.
A fully automatic bevel cleaning system is an automated piece of equipment that integrates deburring and surface cleaning of workpiece edges into one complete process.