Multi-Cylinder Gas System

Technical Specifications：

Pre-Filter: 5 μm

Final Filter: 0.003 μm
Standard Configuration: Single-Cylinder Cabinet, Dual-Cylinder Cabinet, Triple-Cylinder Cabinet
Application Areas: University Laboratories, Materials Analysis Laboratories, Semiconductor Chip Manufacturing, Photovoltaic Solar Cells, Biomedical Engineering, Microelectronics New Materials, and other industries

Features of the equipment：

Automatic purging, automatic switching, and automatic emergency shutdown.

PLC control with touchscreen HMI.
Built-in safety interlock and valve flow safety sensing design for safe and reliable operation.
Equipped with fire detection, smoke detection, and gas detection functions.
Internal gas manifold can be customized according to customer requirements.